Substrate Heaters for MOCVD and PVD systems

E-science substrate heaters are highly robust and thermally efficient. High temperature uniformity is achieved through the incorporation of a flat serpentine filament. This design provides the maximum surface area to thermally couple with the substrate. The flat surface provides a higher emissivity towards the substrate for the same power applied to the heater. This, along with our carefully designed heat shielding, allows users to operate at a lower power achieving similar or higher temperatures at the substrate.

MOCVD Substrate Heater

Specifically engineered to handle the high strain of nitride growth temperatures exceeding 1200°C and exposure to aggressive reactive chemical vapors.